HiQLab: Simulation of Resonant MEMS


HiQLab is a finite element program written to study resonant MEMS, and particularly to study damping in resonant MEMS. Though the program is designed with a specific application in mind, the architecture is general, and can handle other types of problems. HiQLab is written in C++, with a mesh input language based on Lua and a MATLAB command interface.

Papers and Presentations


To build HiQLab, you will need to install ARPACK and UMFPACK. At the moment, you also need MATLAB to do much useful work, though there is a standalone front-end. HiQLab uses autoconf, so you should be able to build for a Unix-ish platform with the usual line (./configure; make).

This software is alpha. It is unlikely to burn your house down and eat your dog, but I make no guarantees. Changes are still occuring frequently, so if you find a bug, check to see if an update has fixed it before you make a report.

Reporting bugs

Bug reports related to HiQLab should be sent to


This material is based on work supported by the National Science Foundation under Grant No. ECS-0426660; by the University of California MICRO program; and by a grant from Sun Microsystems.

Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors and do not necessarily reflect the views of the NSF, the University of California, or Sun Microsystems.

David Bindel