Polycrystalline
metallic films
play an important role in the advance of many modern
technologies such as
integrated circuits, information storage systems, displays,
sensors and
coatings. In integrated circuit technology, the transistors on
the
semiconductor chip are interconnected via narrow, thin metallic
lines. Metallic
films are also used as the magnetic information storage layer in
hard disk
drives, and as antenna and reflector elements in in optical
applications. The
physical behavior of metals in thin film form is often
remarkably different
from that of the corresponding bulk metallic material so it is
important to
study their structure and
properties. The
polycrystalline structure
of the films forms during deposition and evolves during
post-deposition processing
via, for example, grain coarsening, more commonly termed grain
growth. This talk
focuses on the comparison of
experiments and simulations of grain growth in metallic films.
Experimental grain
growth characteristics are examined by bringing together a large
body of
grain size data for
Al and Cu films, in addition to data for the distribution of
grain sides and
other topology and topology-geometry metrics. The experimental
data is used to
evidence stagnation of grain growth and to arrive at a universal
experimental
grain size distribution. This universal distribution deviates
from the
distribution obtained in two-dimensional simulations of grain
growth with
isotropic boundary energy in two notable regions termed the
“ear” and the
“tail”. In seeking
the cause of the observed
differences between experiment and simulation, the impact of
surface and
elastic strain energy, anisotropy of grain boundary energy,
grain boundary
grooving, impurity drag, and triple junction drag is examined. Recent work on
comparison of experiments and simulations
of the phase field crystal model of grain growth will also be
discussed.